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Ion implantation / G. Dearnaley and others. - Amsterdam, New York, North-Holland Pub. Co.; American Elsevier, c1973. - xv, 802 p. : illus. ; 23 cm. - Defects in crystalline solids, v. 8 .

Includes index.

ISBN: 0444104887 (American Elsevier)

LCCN: 72093492

Nat. Bib. No.: Ne74-3

Subjects--Topical Terms:
Ion implantation.

LC Class. No.: TK7871.85 / .I586

Dewey Class. No.: 537.56 / DEI

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