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Townsend, P. D.

Ion implantation, sputtering and their applications / by P. D. Townsend, J. C. Kelly, N. E. W. Hartley. - London ; New York : Academic Press, 1976. - ix, 333 p. : ill. ; 24 cm.

Includes bibliographies and index.

ISBN: 0126969507

LCCN: 75196983

Nat. Bib. No.: GB***

Subjects--Topical Terms:
Ion implantation.
Sputtering (Physics)

LC Class. No.: QC702.7.I55 / T67

Dewey Class. No.: 541.2 / TOI

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