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Kääriäinen, Tommi.

Atomic layer deposition : principles, characteristics, and nanotechnology applications / [electronic resource] Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman. - 2nd edition. - 1 online resource.

Includes bibliographical references and index.

ISBN: 9781118747384 1118747380 9781118747421 1118747429 9781118747346 1118747348 9781118747407 1118747402 9781299619128 1299619126

LCCN: 2013016681

Subjects--Topical Terms:
Chemical vapor deposition.
Epitaxy.
Microelectronics.
Nanotechnology.
SCIENCE--Nanoscience.
TECHNOLOGY & ENGINEERING--Nanotechnology & MEMS.
Chemical vapor deposition.
Epitaxy.
Microelectronics.
Nanotechnology.
Nanotechnologie
Atomlagenabscheidung
Mikroelektromekaniska system.

Index Terms--Genre/Form:
Electronic books.
Electronic books.

LC Class. No.: TS695

Dewey Class. No.: 620/.5

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