Madou, Marc J.
Fundamentals of microfabrication and nanotechnology : Vol. 3 : Manufacturing techniques and applications / Marc J. Madou. - 3rd ed. - Boca Raton : CRC Press, 2012. - v. : ill. (some col.) ; 29 cm.
Includes bibliographical references and index.
9781420055160 (hbk)
Nanotechnology
620.5 / MAF
Fundamentals of microfabrication and nanotechnology : Vol. 3 : Manufacturing techniques and applications / Marc J. Madou. - 3rd ed. - Boca Raton : CRC Press, 2012. - v. : ill. (some col.) ; 29 cm.
Includes bibliographical references and index.
9781420055160 (hbk)
Nanotechnology
620.5 / MAF