Elliott, David J.
Microlithography : process technology for IC fabrication / David J. Elliott. - New York : McGraw-Hill, c1986. - xix, 378 p. : ill. ; 24 cm.
Includes bibliographies and index.
0070193045 : $42.00
85018196
Integrated circuits--Very large scale integration--Design and construction.
Microlithography.
Photoresists.
TK7874 / .E495 1986
621.38173 / ELM
Microlithography : process technology for IC fabrication / David J. Elliott. - New York : McGraw-Hill, c1986. - xix, 378 p. : ill. ; 24 cm.
Includes bibliographies and index.
0070193045 : $42.00
85018196
Integrated circuits--Very large scale integration--Design and construction.
Microlithography.
Photoresists.
TK7874 / .E495 1986
621.38173 / ELM