Lee, Hong H.
Fundamentals of microelectronics processing / Hong H. Lee. - New York : McGraw-Hill, c1990. - xvi, 514 p. : ill. ; 25 cm. - McGraw-Hill chemical engineering series .
Includes bibliographies and index.
0070370567 : $46.95
89012114
Integrated circuits--Design and construction.
Integrated circuits--Materials.
TK7874 / .L34 1990
621.3815 / LEF
Fundamentals of microelectronics processing / Hong H. Lee. - New York : McGraw-Hill, c1990. - xvi, 514 p. : ill. ; 25 cm. - McGraw-Hill chemical engineering series .
Includes bibliographies and index.
0070370567 : $46.95
89012114
Integrated circuits--Design and construction.
Integrated circuits--Materials.
TK7874 / .L34 1990
621.3815 / LEF