Handbook of microlithography, micromachining, and microfabrication /
Microlithography, micromachining, and microfabrication
P. Rai-Choudhury, editor.
- Bellingham, Wash., USA : London, UK : SPIE Optical Engineering Press ; Institution of Electrical Engineers, c1997.
- 2 v. : ill. ; 26 cm.
- IEE materials and devices series ; 12A-12B .
- IEE materials & devices series ; 12A-12B. .
Includes bibliographical references and indexes.
v. 1. Microlithography -- v. 2. Micromachining and microfabrication.
0819423785 (v. 1) 0819423793 (v. 2)
96040237
Microlithography.
Micromachining.
Microfabrication.
TK7836 / .H3423 1997
670 / 476144
Includes bibliographical references and indexes.
v. 1. Microlithography -- v. 2. Micromachining and microfabrication.
0819423785 (v. 1) 0819423793 (v. 2)
96040237
Microlithography.
Micromachining.
Microfabrication.
TK7836 / .H3423 1997
670 / 476144