Handbook of thin film process technology /
Thin film process technology
ed. by David A. Glocker and S. Ismat Shah.
- Bristol, UK ; Philadelphia : Institute of Physics, c1995.
- xvii, 1 v. (various pagings) : ill. ; 31 cm.
Accompanied by: Supplement 98/1, Reactive sputtering / guest editor, William D. Westwood (1 v. (various pagings) : ill. ; 30 cm.) Bristol ; Philadelphia : The Institute, [c1998]. Call number: TA418.9.T45 H36 1995 Suppl. 98/1 Accompanied by : Supplement 98/2, Recipes for optical materials / editors, David A. Glocker, S. Ismat Shah (1 v. (various pagings) : ill. ; 31 cm.) Bristol ; Philadelphia : The Institute, [c1998]. Call number: TA418.9.T45 H36 1995 Suppl. 98/2
Includes bibliographical references and indexes.
0750303115 0750305290 (98/2 suppl.)
95237129
Thin films--Handbooks, manuals, etc.
Surfaces (Technology)--Handbooks, manuals, etc.
TA418.9.T45 / H36 1995
621.38152 / HAN
Accompanied by: Supplement 98/1, Reactive sputtering / guest editor, William D. Westwood (1 v. (various pagings) : ill. ; 30 cm.) Bristol ; Philadelphia : The Institute, [c1998]. Call number: TA418.9.T45 H36 1995 Suppl. 98/1 Accompanied by : Supplement 98/2, Recipes for optical materials / editors, David A. Glocker, S. Ismat Shah (1 v. (various pagings) : ill. ; 31 cm.) Bristol ; Philadelphia : The Institute, [c1998]. Call number: TA418.9.T45 H36 1995 Suppl. 98/2
Includes bibliographical references and indexes.
0750303115 0750305290 (98/2 suppl.)
95237129
Thin films--Handbooks, manuals, etc.
Surfaces (Technology)--Handbooks, manuals, etc.
TA418.9.T45 / H36 1995
621.38152 / HAN