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Moreau, Wayne M.

Semiconductor lithography : principles, practices, and materials / Wayne M. Moreau. - New York : Plenum Press, c1988. - xx, 931 p. : ill. ; 25 cm. - Microdevices .

Includes bibliographies and index.

ISBN: 0306421852

LCCN: 87029077

Subjects--Topical Terms:
Semiconductors.
Microlithography.
Photoresists.

LC Class. No.: TK7871.85 / .M583 1988

Dewey Class. No.: 621.38152 / MOS

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