Okoroanyanwu, Uzodinma.
Chemistry and lithography / Uzodinma Okoroanyanwu. - Hoboken, N.J. : Bellingham, Wash., USA : Wiley ; SPIE Press, c2010. - xxix, 861 p. : ill. ; 26 cm.
Includes bibliographical references and index.
9780819475626 (SPIE) 9781118030028 (Wiley)
2009036266
Lithography.
Chemistry, Technical.
Semiconductors--Etching.
TP156.E68 / O44 2010
621.381531 / OKC
Chemistry and lithography / Uzodinma Okoroanyanwu. - Hoboken, N.J. : Bellingham, Wash., USA : Wiley ; SPIE Press, c2010. - xxix, 861 p. : ill. ; 26 cm.
Includes bibliographical references and index.
9780819475626 (SPIE) 9781118030028 (Wiley)
2009036266
Lithography.
Chemistry, Technical.
Semiconductors--Etching.
TP156.E68 / O44 2010
621.381531 / OKC