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Korvink, J. G.

Semiconductors for micro- and nanotechnology : an introduction for engineers / Jan G. Korvink and Andreas Greiner. - Weinheim : Wiley-VCH, c2002. - 340 p. : ill. ; 24 cm.

Includes bibliographical references and index.

ISBN: 3527302573

LCCN: 2002512459

Nat. Bib. No.: GBA1-Z8391

Subjects--Topical Terms:
Semiconductors--Textbooks.
Nanotechnology--Mathematics--Textbooks.
Microtechnology--Mathematics--Textbooks.

LC Class. No.: QC611 / .K75 2002

Dewey Class. No.: 621.38152 / KOS

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