Zant, Peter Van.
Microchip fabrication : a practical guide to semiconductor processing / Peter Van Zant. - 5th ed. - New York : McGraw-Hill, c2004. - xiii, 642 p. : ill. ; 23 cm.
Includes bibliographical references and index.
0071432418
00023171
Semiconductors--Design and construction.
Integrated circuits--Design and construction.
TK7871.85 / .V36 2000
621.38152 / ZAM
Microchip fabrication : a practical guide to semiconductor processing / Peter Van Zant. - 5th ed. - New York : McGraw-Hill, c2004. - xiii, 642 p. : ill. ; 23 cm.
Includes bibliographical references and index.
0071432418
00023171
Semiconductors--Design and construction.
Integrated circuits--Design and construction.
TK7871.85 / .V36 2000
621.38152 / ZAM