ULSI technology /
ed. by C. Y. chang nad S. M. Sze.
- New York : McGraw-hill, c 1996.
- xxv, 726 p. : ill. ; 22 cm.
- McGraw-hill series in electrical and computer engineering. .
includes bibliographical references and index.
Semiconductors.
621.381 / ULT
includes bibliographical references and index.
Semiconductors.
621.381 / ULT