Fujita, H
Micromachines as tools for nanotechnology / H. Fujita (ed.) - Berlin ; New York : Springer, 2003. - xii, 211 : ill. ; 24 cm. - Microtechnology and MEMS .
Includes bibliographical references.
354000856X (alk. paper)
2003045497
Nanotechnology.
Microelectromechanical systems.
T174.7 / .F85 2003
620.5 / FUM
Micromachines as tools for nanotechnology / H. Fujita (ed.) - Berlin ; New York : Springer, 2003. - xii, 211 : ill. ; 24 cm. - Microtechnology and MEMS .
Includes bibliographical references.
354000856X (alk. paper)
2003045497
Nanotechnology.
Microelectromechanical systems.
T174.7 / .F85 2003
620.5 / FUM