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Fujita, H

Micromachines as tools for nanotechnology / H. Fujita (ed.) - Berlin ; New York : Springer, 2003. - xii, 211 : ill. ; 24 cm. - Microtechnology and MEMS .

Includes bibliographical references.

354000856X (alk. paper)

2003045497


Nanotechnology.
Microelectromechanical systems.

T174.7 / .F85 2003

620.5 / FUM
Last Updated on September 15, 2019
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