Campanella, Humberto.
Acoustic wave and electromechanical resonators : concept to key applications / Acoustic wave & electromechanical resonators Humberto Campanella. - Norwood, MA. : Artech House, c2010. - xv, 345 p. : ill. ; 26 cm. - Integrated microsystems series .
Includes bibliographical references and index.
1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies.
9781607839774 1607839776
2010278239
Acoustic surface wave devices.
Electric resonators.
TK5981 / .C347 2010
621.3815 / CAA
Acoustic wave and electromechanical resonators : concept to key applications / Acoustic wave & electromechanical resonators Humberto Campanella. - Norwood, MA. : Artech House, c2010. - xv, 345 p. : ill. ; 26 cm. - Integrated microsystems series .
Includes bibliographical references and index.
1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies.
9781607839774 1607839776
2010278239
Acoustic surface wave devices.
Electric resonators.
TK5981 / .C347 2010
621.3815 / CAA