A practical guide to optical metrology for thin films / (Record no. 206249)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 04154cam a2200685Ma 4500 |
| 001 - CONTROL NUMBER | |
| control field | ocn816311244 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | OCoLC |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20171113085140.0 |
| 006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS | |
| fixed length control field | m o d |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION | |
| fixed length control field | cr cnu|||||||| |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 120622s2012 gw a ob 001 0 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9783527664344 |
| Qualifying information | (electronic bk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 3527664343 |
| Qualifying information | (electronic bk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9783527664351 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 3527664351 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9781299475991 |
| Qualifying information | (MyiLibrary) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 129947599X |
| Qualifying information | (MyiLibrary) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9783527664375 |
| Qualifying information | (electronic bk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 3527664378 |
| Qualifying information | (electronic bk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| Canceled/invalid ISBN | 3527411674 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| Canceled/invalid ISBN | 9783527411672 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| Canceled/invalid ISBN | 9783527664368 |
| Qualifying information | (mobi) |
| 029 0# - OTHER SYSTEM CONTROL NUMBER (OCLC) | |
| OCLC library identifier | AU@ |
| System control number | 000050138801 |
| 029 1# - OTHER SYSTEM CONTROL NUMBER (OCLC) | |
| OCLC library identifier | DEBBG |
| System control number | BV041829500 |
| 029 1# - OTHER SYSTEM CONTROL NUMBER (OCLC) | |
| OCLC library identifier | DEBBG |
| System control number | BV041909974 |
| 029 1# - OTHER SYSTEM CONTROL NUMBER (OCLC) | |
| OCLC library identifier | DEBSZ |
| System control number | 431241112 |
| 029 1# - OTHER SYSTEM CONTROL NUMBER (OCLC) | |
| OCLC library identifier | NZ1 |
| System control number | 14873616 |
| 029 1# - OTHER SYSTEM CONTROL NUMBER (OCLC) | |
| OCLC library identifier | NZ1 |
| System control number | 15341083 |
| 035 ## - SYSTEM CONTROL NUMBER | |
| System control number | (OCoLC)816311244 |
| Canceled/invalid control number | (OCoLC)815392087 |
| -- | (OCoLC)840258022 |
| -- | (OCoLC)841172161 |
| 037 ## - SOURCE OF ACQUISITION | |
| Stock number | 478849 |
| Source of stock number/acquisition | MIL |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | AU@ |
| Language of cataloging | eng |
| Description conventions | pn |
| Transcribing agency | AU@ |
| Modifying agency | CUS |
| -- | OCLCQ |
| -- | UIU |
| -- | DG1 |
| -- | YDXCP |
| -- | MHW |
| -- | EBLCP |
| -- | CDX |
| -- | OCLCO |
| -- | COO |
| -- | IDEBK |
| -- | MEAUC |
| -- | OCLCQ |
| -- | OCLCF |
| -- | DEBSZ |
| -- | N$T |
| -- | E7B |
| -- | DEBBG |
| -- | OCLCQ |
| -- | DG1 |
| 049 ## - LOCAL HOLDINGS (OCLC) | |
| Holding library | MAIN |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | QC176.84.O7 |
| Item number | Q56 2012 |
| 072 #7 - SUBJECT CATEGORY CODE | |
| Subject category code | SCI |
| Source | eflch |
| 072 #7 - SUBJECT CATEGORY CODE | |
| Subject category code | SCI |
| Subject category code subdivision | 024000 |
| Source | bisacsh |
| 072 #7 - SUBJECT CATEGORY CODE | |
| Subject category code | SCI |
| Subject category code subdivision | 041000 |
| Source | bisacsh |
| 072 #7 - SUBJECT CATEGORY CODE | |
| Subject category code | SCI |
| Subject category code subdivision | 055000 |
| Source | bisacsh |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 530.4/275 |
| Edition number | 23 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Quinten, Michael. |
| 245 12 - TITLE STATEMENT | |
| Title | A practical guide to optical metrology for thin films / |
| Statement of responsibility, etc. | Michael Quinten. |
| Medium | [electronic resource] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc. | Weinheim : |
| Name of publisher, distributor, etc. | Wiley-VCH ; |
| Place of publication, distribution, etc. | Chichester : |
| Name of publisher, distributor, etc. | John Wiley [distributor], |
| Date of publication, distribution, etc. | 2012. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 1 online resource : |
| Other physical details | illustrations |
| 336 ## - CONTENT TYPE | |
| Content type term | text |
| Content type code | txt |
| Source | rdacontent |
| 337 ## - MEDIA TYPE | |
| Media type term | computer |
| Media type code | c |
| Source | rdamedia |
| 338 ## - CARRIER TYPE | |
| Carrier type term | online resource |
| Carrier type code | cr |
| Source | rdacarrier |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc | Includes bibliographical references and index. |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Formatted contents note | Cover; Related Titles; Title Page; Copyright; Dedication; Preface; Chapter 1: Introduction; Chapter 2: Propagation of Light and Other Electromagnetic Waves; 2.1 Properties of Electromagnetic Waves; 2.2 Huygens-Fresnel Principle; 2.3 Interference of Electromagnetic Waves; 2.4 Reflection and Refraction; 2.5 Diffraction; 2.6 Scattering; 2.7 Dielectric Function and Refractive Index; Chapter 3: Spectral Reflectance and Transmittance of a Layer Stack; 3.1 Reflectance and Transmittance of a Single Layer; 3.2 Propagating Wave Model for a Layer Stack; Chapter 4: The Optical Measurement. |
| 505 8# - FORMATTED CONTENTS NOTE | |
| Formatted contents note | 7.7 Measurement of Critical DimensionsNumerics with Complex Numbers; A.1 Addition; A.2 Multiplication; A.3 Modulus; A.4 Division; A.5 Power n; A.6 Logarithm; A.7 Exponentiation; A.8 Trigonometric Functions; Fourier Transform; B.1 Linearity; B.2 Scaling; B.3 Shifting; B.4 Damping; B.5 Convolution; B.6 Plancherel Theorem and Parseval's Theorem; Levenberg-Marquardt Algorithm; Downhill Simplex Algorithm; References; Index. |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc. | A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromag. |
| 588 0# - SOURCE OF DESCRIPTION NOTE | |
| Source of description note | Print version record. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Thin films |
| General subdivision | Optical properties. |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | SCIENCE |
| General subdivision | Energy. |
| Source of heading or term | bisacsh |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | SCIENCE |
| General subdivision | Mechanics |
| -- | General. |
| Source of heading or term | bisacsh |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | SCIENCE |
| General subdivision | Physics |
| -- | General. |
| Source of heading or term | bisacsh |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Thin films |
| General subdivision | Optical properties. |
| Source of heading or term | fast |
| Authority record control number | (OCoLC)fst01150034 |
| 655 #4 - INDEX TERM--GENRE/FORM | |
| Genre/form data or focus term | Electronic books. |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY | |
| Relationship information | Print version: |
| Main entry heading | Quinten, Michael. |
| Title | Practical guide to optical metrology for thin films. |
| Place, publisher, and date of publication | Weinheim : Wiley-VCH ; Chichester : John Wiley [distributor], 2012 |
| International Standard Book Number | 9783527411672 |
| Record control number | (OCoLC)815367813 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | http://onlinelibrary.wiley.com/book/10.1002/9783527664344 |
| Public note | Wiley Online Library |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | |
| Koha item type | Books |
No items available.