Includes bibliographical references and index.

Physical and Mathematical Fundamentals. Introduction: Issues in Microsystems Modeling / Gary K Fedder, Tamal Mukherjee -- System-Level Modeling of MEMS Using Generalized Kirchhoffian Networks : Basic Principles / Gabriele Schrag, Gerhard Wachutka -- System-Level Modeling of MEMS by Means of Model Order Reduction (Mathematical Approximations) : Mathematical Background / Lihong Feng, Peter Benner, Jan G Korvink -- Algorithmic Approaches for System-Level Simulation of MEMS and Aspects of Cosimulation / Peter Schneider, Christoph Clauss, Ulrich Donath, Günter Elst, Olaf Enge-Rosenblatt, Thomas Uhle -- Lumped Element Modeling Method for MEMS Devices. System-Level Modeling of Surface Micromachined Beamlike Electrothermal Microactuators / Ren-Gang Li, Qing-An Huang -- System-Level Modeling of Packaging Effects of MEMS Devices / Jing Song, Qing-An Huang -- Mixed-Level Approach for the Modeling of Distributed Effects in Microsystems / Martin Niessner, Gabriele Schrag -- Compact Modeling of RF-MEMS Devices / Jacopo Iannacci -- Mathematical Model Order Reduction for MEMS Devices. Moment-Matching-Based Linear Model Order Reduction for Nonparametric and Parametric Electrothermal MEMS Models / Tamara Bechtold, Dennis Hohlfeld, Evgenii B Rudnyi, Jan G Korvink -- Projection-Based Nonlinear Model Order Reduction / Amit Hochman, Dmitry M Vasilyev, Michael J Rewieński, Jacob K White -- Linear and Nonlinear Model Order Reduction for MEMS Electrostatic Actuators / Jan Lienemann, Emanuele Bertarelli, Andreas Greiner, Jan G Korvink -- Modal-Superposition-Based Nonlinear Model Order Reduction for MEMS Gyroscopes / Jan Mehner -- Modeling of Entire Microsystems. Towards System-Level Simulation of Energy Harvesting Modules / Dennis Hohlfeld, Tamara Bechtold, Evgenii B Rudnyi, Bert Op het Veld, Rob van Schaijk -- Application of Reduced Order Models in Circuit-Level Design for RF MEMS Devices / Laura Del Tin, Evgenii B Rudnyi, Jan G Korvink -- SystemC AMS and Cosimulation Aspects / François Pêcheux, Marie-Minerve Louërat, Karsten Einwich -- System Level Modeling of Electromechanical Sigma-Delta Modulators for Inertial MEMS Sensors / Michael Kraft -- Software Implementations. 3D Parametric-Library-Based MEMS/IC Design / Gunar Lorenz, Gerold Schröpfer -- MOR for ANSYS / Evgenii B Rudnyi -- SUGAR: A SPICE for MEMS / Jason V Clark -- Model Order Reduction Implementations in Commercial MEMS Design Environment / Sandeep Akkaraju -- Reduced Order Modeling of MEMS and IC Systems : A Practical Approach / Sebastien Cases, Mary-Ann Maher -- A Web-Based Community for Modeling and Design of MEMS / Peter J Gilgunn, Jason V Clark, Narayan Aluru, Tamal Mukherjee, Gary K Fedder.

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