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Resonant MEMS : fundamentals, implementation and application / [electronic resource]

by Brand, Oliver [editor.]; Dufour, Isabelle (Electrical engineer) [editor.]; Heinrich, Stephen M [editor.]; Josse, Fabien [editor.].
Material type: materialTypeLabelBookSeries: Advanced micro & nanosystems: Publisher: Wiesbaden : Wiley-VCH Verlag & Co. KGaA, [2015]Description: 1 online resource : illustrations.ISBN: 9783527676361; 3527676368; 9783527676354; 352767635X; 9783527676347; 3527676341; 9783527676330; 3527676333; 3527335455; 9783527335459.Subject(s): Microelectromechanical systems -- Design and construction | Microfabrication | Resonance | TECHNOLOGY & ENGINEERING / Electronics / Digital | TECHNOLOGY & ENGINEERING / Electronics / General | TECHNOLOGY & ENGINEERING / Electronics / Microelectronics | Microelectromechanical systems -- Design and construction | Microfabrication | Resonance | Electronic books | Electronic booksOnline resources: Wiley Online Library
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Includes bibliographical references and index.

Online resource; title from PDF title page (Ebsco, viewed May 11, 2015).

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Last Updated on September 15, 2019
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