Handbook of microlithography, micromachining, and microfabrication /
by Rai-Choudhury, P.
Material type:
BookSeries: IEE materials & devices series: 12A-12B.Publisher: Bellingham, Wash., USA : London, UK : SPIE Optical Engineering Press ; Institution of Electrical Engineers, c1997Description: 2 v. : ill. ; 26 cm.ISBN: 0819423785 (v. 1); 0819423793 (v. 2).Other title: Microlithography, micromachining, and microfabrication.Subject(s): Microlithography | Micromachining | Microfabrication
Contents:
v. 1. Microlithography -- v. 2. Micromachining and microfabrication.
| Item type | Current location | Collection | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|---|
Books
|
Dhaka University Science Library General Stacks | Non Fiction | 670 476144 (Browse shelf) | Available | 476144 |
Includes bibliographical references and indexes.
v. 1. Microlithography -- v. 2. Micromachining and microfabrication.
There are no comments for this item.