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Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. /

by Osgood, R. M; Brueck, S. R. J; Schlossberg, H. R; United States. Air Force. Office of Scientific Research.
Material type: materialTypeLabelBookSeries: Materials Research Society symposia proceedings: v. 17.Publisher: New York : North-Holland, c1983Description: xiii, 298 p. : ill. ; 24 cm.ISBN: 0444007822 :.Subject(s): Lasers -- Industrial applications -- Congresses | Semiconductors -- Congresses
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Non Fiction 621.3815 OSL (Browse shelf) Available A278293

"Sponsored by the Air Force Office of Scientific Research"--T.p. verso.

Includes bibliographical references and indexes.

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