Handbook of 3D Integration : 3D process technology / [electronic resource]
by Garrou, Philip E [editor.]; Koyanagi, Mitsumasa [editor.]; Ramm, Peter [editor.].
Material type: BookPublisher: Weinheim, Germany : Wiley-VCH, 2014.Description: 1 online resource.ISBN: 9783527670109; 3527670106.Subject(s): Three-dimensional integrated circuits -- Design and construction -- Handbooks, manuals, etc | Three-dimensional imaging -- Handbooks, manuals, etc | Electronic booksOnline resources: Wiley Online LibraryNo physical items for this record
Includes bibliographical references and index.
Online resource; title from PDF title page (John Wiley, viewed Aug. 13, 2014).
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