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005 20171113085140.0
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008 120622s2012 gw a ob 001 0 eng
020 _a9783527664344
_q(electronic bk.)
020 _a3527664343
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020 _a9783527664351
020 _a3527664351
020 _a9781299475991
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020 _a129947599X
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020 _a9783527664375
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020 _a3527664378
_q(electronic bk.)
020 _z3527411674
020 _z9783527411672
020 _z9783527664368
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072 7 _aSCI
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_223
100 1 _aQuinten, Michael.
245 1 2 _aA practical guide to optical metrology for thin films /
_cMichael Quinten.
_h[electronic resource]
260 _aWeinheim :
_bWiley-VCH ;
_aChichester :
_bJohn Wiley [distributor],
_c2012.
300 _a1 online resource :
_billustrations
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
504 _aIncludes bibliographical references and index.
505 0 _aCover; Related Titles; Title Page; Copyright; Dedication; Preface; Chapter 1: Introduction; Chapter 2: Propagation of Light and Other Electromagnetic Waves; 2.1 Properties of Electromagnetic Waves; 2.2 Huygens-Fresnel Principle; 2.3 Interference of Electromagnetic Waves; 2.4 Reflection and Refraction; 2.5 Diffraction; 2.6 Scattering; 2.7 Dielectric Function and Refractive Index; Chapter 3: Spectral Reflectance and Transmittance of a Layer Stack; 3.1 Reflectance and Transmittance of a Single Layer; 3.2 Propagating Wave Model for a Layer Stack; Chapter 4: The Optical Measurement.
505 8 _a7.7 Measurement of Critical DimensionsNumerics with Complex Numbers; A.1 Addition; A.2 Multiplication; A.3 Modulus; A.4 Division; A.5 Power n; A.6 Logarithm; A.7 Exponentiation; A.8 Trigonometric Functions; Fourier Transform; B.1 Linearity; B.2 Scaling; B.3 Shifting; B.4 Damping; B.5 Convolution; B.6 Plancherel Theorem and Parseval's Theorem; Levenberg-Marquardt Algorithm; Downhill Simplex Algorithm; References; Index.
520 _aA one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromag.
588 0 _aPrint version record.
650 0 _aThin films
_xOptical properties.
650 7 _aSCIENCE
_xEnergy.
_2bisacsh
650 7 _aSCIENCE
_xMechanics
_xGeneral.
_2bisacsh
650 7 _aSCIENCE
_xPhysics
_xGeneral.
_2bisacsh
650 7 _aThin films
_xOptical properties.
_2fast
_0(OCoLC)fst01150034
655 4 _aElectronic books.
776 0 8 _iPrint version:
_aQuinten, Michael.
_tPractical guide to optical metrology for thin films.
_dWeinheim : Wiley-VCH ; Chichester : John Wiley [distributor], 2012
_z9783527411672
_w(OCoLC)815367813
856 4 0 _uhttp://onlinelibrary.wiley.com/book/10.1002/9783527664344
_zWiley Online Library
942 _2ddc
_cBK
999 _c206249
_d206249