000 | 04154cam a2200685Ma 4500 | ||
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001 | ocn816311244 | ||
003 | OCoLC | ||
005 | 20171113085140.0 | ||
006 | m o d | ||
007 | cr cnu|||||||| | ||
008 | 120622s2012 gw a ob 001 0 eng | ||
020 |
_a9783527664344 _q(electronic bk.) |
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020 |
_a3527664343 _q(electronic bk.) |
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020 | _a9783527664351 | ||
020 | _a3527664351 | ||
020 |
_a9781299475991 _q(MyiLibrary) |
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020 |
_a129947599X _q(MyiLibrary) |
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020 |
_a9783527664375 _q(electronic bk.) |
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020 |
_a3527664378 _q(electronic bk.) |
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020 | _z3527411674 | ||
020 | _z9783527411672 | ||
020 |
_z9783527664368 _q(mobi) |
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_a(OCoLC)816311244 _z(OCoLC)815392087 _z(OCoLC)840258022 _z(OCoLC)841172161 |
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049 | _aMAIN | ||
050 | 4 |
_aQC176.84.O7 _bQ56 2012 |
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_aSCI _2eflch |
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_aSCI _x024000 _2bisacsh |
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_a530.4/275 _223 |
100 | 1 | _aQuinten, Michael. | |
245 | 1 | 2 |
_aA practical guide to optical metrology for thin films / _cMichael Quinten. _h[electronic resource] |
260 |
_aWeinheim : _bWiley-VCH ; _aChichester : _bJohn Wiley [distributor], _c2012. |
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300 |
_a1 online resource : _billustrations |
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336 |
_atext _btxt _2rdacontent |
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337 |
_acomputer _bc _2rdamedia |
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338 |
_aonline resource _bcr _2rdacarrier |
||
504 | _aIncludes bibliographical references and index. | ||
505 | 0 | _aCover; Related Titles; Title Page; Copyright; Dedication; Preface; Chapter 1: Introduction; Chapter 2: Propagation of Light and Other Electromagnetic Waves; 2.1 Properties of Electromagnetic Waves; 2.2 Huygens-Fresnel Principle; 2.3 Interference of Electromagnetic Waves; 2.4 Reflection and Refraction; 2.5 Diffraction; 2.6 Scattering; 2.7 Dielectric Function and Refractive Index; Chapter 3: Spectral Reflectance and Transmittance of a Layer Stack; 3.1 Reflectance and Transmittance of a Single Layer; 3.2 Propagating Wave Model for a Layer Stack; Chapter 4: The Optical Measurement. | |
505 | 8 | _a7.7 Measurement of Critical DimensionsNumerics with Complex Numbers; A.1 Addition; A.2 Multiplication; A.3 Modulus; A.4 Division; A.5 Power n; A.6 Logarithm; A.7 Exponentiation; A.8 Trigonometric Functions; Fourier Transform; B.1 Linearity; B.2 Scaling; B.3 Shifting; B.4 Damping; B.5 Convolution; B.6 Plancherel Theorem and Parseval's Theorem; Levenberg-Marquardt Algorithm; Downhill Simplex Algorithm; References; Index. | |
520 | _aA one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromag. | ||
588 | 0 | _aPrint version record. | |
650 | 0 |
_aThin films _xOptical properties. |
|
650 | 7 |
_aSCIENCE _xEnergy. _2bisacsh |
|
650 | 7 |
_aSCIENCE _xMechanics _xGeneral. _2bisacsh |
|
650 | 7 |
_aSCIENCE _xPhysics _xGeneral. _2bisacsh |
|
650 | 7 |
_aThin films _xOptical properties. _2fast _0(OCoLC)fst01150034 |
|
655 | 4 | _aElectronic books. | |
776 | 0 | 8 |
_iPrint version: _aQuinten, Michael. _tPractical guide to optical metrology for thin films. _dWeinheim : Wiley-VCH ; Chichester : John Wiley [distributor], 2012 _z9783527411672 _w(OCoLC)815367813 |
856 | 4 | 0 |
_uhttp://onlinelibrary.wiley.com/book/10.1002/9783527664344 _zWiley Online Library |
942 |
_2ddc _cBK |
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999 |
_c206249 _d206249 |