000			05805cam a2200697Ia 4500
001			ocn881417015
003			OCoLC
005			20171029124011.0
006			m o d
007			cr cnu---unuuu
008			140614s2014 enk ob 001 0 eng d
020			_a9781118984796 _q(electronic bk.)
020			_a111898479X _q(electronic bk.)
020			_a9781118984857 _q(electronic bk.)
020			_a1118984854 _q(electronic bk.)
020			_a9781118984772 _q(electronic bk.)
020			_a1118984773 _q(electronic bk.)
020			_a1848216548
020			_a9781848216549
020			_z9781848216549
029	1		_aCHBIS _b010442061
029	1		_aCHVBK _b334095409
029	1		_aDEBBG _bBV043396911
029	1		_aNZ1 _b15592138
029	1		_aNZ1 _b15906901
035			_a(OCoLC)881417015 _z(OCoLC)908035691 _z(OCoLC)961583710 _z(OCoLC)962703208
040			_aEBLCP _beng _epn _cEBLCP _dN$T _dDG1 _dE7B _dIDEBK _dCUS _dYDXCP _dCDX _dOCLCF _dOCLCQ _dRECBK _dCOO _dDEBBG _dOCLCQ
049			_aMAIN
050		4	_aTK7871.99.M44
072		7	_aTEC _x009070 _2bisacsh
082	0	4	_a621.381 _223
245	0	0	_aBeyond-CMOS Nanodevices 1 / _cedited by Francis Balestra. _h[electronic resource]
264		1	_aLondon : _bISTE ; _aHoboken, NJ : _bWiley, _c2014.
300			_a1 online resource (xix, 495 pages).
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
490	1		_aNanoscience and nanotechnology series
500			_a6.2.3. MEMS piezoelectric vibration energy harvesting transducers.
504			_aIncludes bibliographical references at the end of each chapters and index.
505	0		_aCover; Title Page; Copyright; Contents; Acknowledgments; General Introduction; Part 1. Silion Nanowire Biochemical Sensors; Part 1. Introduction; Chapter 1. Fabrication Of Nanowires; 1.1. Introduction; 1.2. Silicon nanowire fabrication with electron beam lithography; 1.2.1. Key requirements; 1.2.2. Why electron beam lithography?; 1.2.3. Lithographic requirements; 1.2.4. Tools, resist materials and development processes; 1.2.5. Exposure strategies and proximity effect correction; 1.2.6. Technology limitations and how to circumvent them.
505	8		_a1.3. Silicon nanowire fabrication with sidewall transfer lithography1.4. Si nanonet fabrication; 1.4.1. Si NWs fabrication; 1.4.2. Si nanonet assembling; 1.4.3. Si nanonet morphology and properties; 1.5. Acknowledgments; 1.6. Bibliography; Chapter 2. Functionalization Of Si-Based NW FETs For DNA Detection; 2.1. Introduction; 2.2. Functionalization process; 2.3. Functionalization of Si nanonets for DNA biosensing; 2.3.1. Detection of DNA hybridization on the Si nanonet by fluorescence microscopy; 2.3.2. Preliminary electrical characterizations of NW networks.
505	8		_a2.4. Functionalization of SiC nanowire-based sensor for electrical DNA biosensing2.4.1. SiC nanowire-based sensor functionalization process; 2.4.2. DNA electrical detection from SiC nanowire-based sensor; 2.5. Acknowledgments; 2.6. Bibliography; Chapter 3. Sensitivity Of Silicon Nanowire Biochemical Sensors; 3.1. Introduction; 3.1.1. Definitions; 3.1.2. Main parameters affecting the sensitivity; 3.2. Sensitivity and noise; 3.3. Modeling the sensitivity of Si NW biosensors; 3.3.1. Modeling the electrolyte; 3.4. Sensitivity of random arrays of 1D nanostructures.
505	8		_a3.4.1. Electrical characterization3.4.2. Low-frequency noise characterization; 3.4.3. Simulation of electron conduction in random networks of 1D nanostructures; 3.4.4. Discussion; 3.5. Conclusions; 3.6. Acknowledgments; 3.7. Bibliography; Chapter 4. Integration Of Silicon Nanowires With CMOS; 4.1. Introduction; 4.2. Overview of CMOS process technology; 4.3. Integration of silicon nanowire after BEOL; 4.4. Integration of silicon nanowires in FEOL; 4.5. Sensor architecture design; 4.6. Conclusions; 4.7. Bibliography.
505	8		_aChapter 5. Portable, Integrated Lock-In-Amplifier-Based System For Real-Time Impedimetric Measurements On Nanowires Biosensors5.1. Introduction; 5.2. Portable stand-alone system; 5.3. Integrated impedimetric interface; 5.4. Impedimetric measurements on nanowire sensors; 5.5. Bibliography; Part 2. New Materials, Devices And Technologies For Energy Harvesting; Part 2. Introduction; Chapter 6. Vibrational Energy Harvesting; 6.1. Introduction; 6.2. Piezoelectric energy transducer; 6.2.1. Introduction; 6.2.2. State-of-the-art devices and materials.
520			_aThis book offers a comprehensive review of the state-of-the-art in innovative Beyond-CMOS nanodevices for developing novel functionalities, logic and memories dedicated to researchers, engineers and students. It particularly focuses on the interest of nanostructures and nanodevices (nanowires, small slope switches, 2D layers, nanostructured materials, etc.) for advanced More than Moore (RF-nanosensors-energy harvesters, on-chip electronic cooling, etc.) and Beyond-CMOS logic and memories applications.
588	0		_aPrint version record.
650		0	_aNanoelectronics.
650		0	_aNanostructures.
650		0	_aMetal oxide semiconductors, Complementary.
650		7	_aTECHNOLOGY & ENGINEERING _xMechanical. _2bisacsh
650		7	_aMetal oxide semiconductors, Complementary. _2fast _0(OCoLC)fst01017635
650		7	_aNanoelectronics. _2fast _0(OCoLC)fst01741867
650		7	_aNanostructures. _2fast _0(OCoLC)fst01032635
655		4	_aElectronic books.
700	1		_aBalestra, Francis.
776	0	8	_iPrint version: _aBalestra, Francis. _tBeyond CMOS Nanodevices 1. _dHoboken : Wiley, 2014 _z9781848216549 _w(DLC) 2014935737
830		0	_aNanoscience and nanotechnology series.
856	4	0	_uhttp://onlinelibrary.wiley.com/book/10.1002/9781118984772 _zWiley Online Library
942			_2ddc _cBK
999			_c207531 _d207531