| 000 | 01739cam a2200469Ki 4500 | ||
|---|---|---|---|
| 001 | ocn886656913 | ||
| 003 | OCoLC | ||
| 005 | 20171026114546.0 | ||
| 006 | m o d | ||
| 007 | cr cnu|||unuuu | ||
| 008 | 140813s2014 gw obf 001 0 eng d | ||
| 020 |
_a9783527670109 _q(electronic bk.) |
||
| 020 |
_a3527670106 _q(electronic bk.) |
||
| 024 | 7 |
_a10.1002/9783527670109 _2doi |
|
| 029 | 1 |
_aCHBIS _b010442130 |
|
| 029 | 1 |
_aCHVBK _b334083966 |
|
| 029 | 1 |
_aGBVCP _b799862703 |
|
| 029 | 1 |
_aNZ1 _b15753508 |
|
| 029 | 1 |
_aNZ1 _b15907019 |
|
| 029 | 1 |
_aDEBBG _bBV043397040 |
|
| 035 |
_a(OCoLC)886656913 _z(OCoLC)900562790 |
||
| 040 |
_aDG1 _beng _erda _epn _cDG1 _dYDXCP _dOCLCQ _dDEBBG |
||
| 049 | _aMAIN | ||
| 050 | 4 | _aTK7874.893 | |
| 082 | 0 | 4 |
_a621.3815 _223 |
| 245 | 0 | 0 |
_aHandbook of 3D Integration : 3D process technology / _cedited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm. _h[electronic resource] |
| 264 | 1 |
_aWeinheim, Germany : _bWiley-VCH, _c2014. |
|
| 300 | _a1 online resource | ||
| 336 |
_atext _btxt _2rdacontent |
||
| 337 |
_acomputer _bc _2rdamedia |
||
| 338 |
_aonline resource _bcr _2rdacarrier |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 588 | 0 | _aOnline resource; title from PDF title page (John Wiley, viewed Aug. 13, 2014). | |
| 650 | 0 |
_aThree-dimensional integrated circuits _xDesign and construction _vHandbooks, manuals, etc. |
|
| 650 | 0 |
_aThree-dimensional imaging _vHandbooks, manuals, etc. |
|
| 655 | 4 | _aElectronic books. | |
| 700 | 1 |
_aGarrou, Philip E., _eeditor. |
|
| 700 | 1 |
_aKoyanagi, Mitsumasa, _eeditor. |
|
| 700 | 1 |
_aRamm, Peter, _eeditor. |
|
| 856 | 4 | 0 |
_uhttp://onlinelibrary.wiley.com/book/10.1002/9783527670109 _zWiley Online Library |
| 942 |
_2ddc _cBK |
||
| 999 |
_c207612 _d207612 |
||