| 000 | 00703cam a22002174a 4500 | ||
|---|---|---|---|
| 003 | BD-DhUL | ||
| 005 | 20210624111221.0 | ||
| 008 | 110519s2012 flua b 001 0 eng | ||
| 020 | _a9781420055160 (hbk) | ||
| 040 |
_aBD-DhUL _cBD-DhUL |
||
| 082 |
_a620.5 _bMAF _223 |
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| 100 | 1 | _aMadou, Marc J. | |
| 245 | 1 | 0 |
_aFundamentals of microfabrication and nanotechnology : _bVol. 3 : Manufacturing techniques and applications / _cMarc J. Madou. |
| 250 | _a3rd ed. | ||
| 260 |
_aBoca Raton : _bCRC Press, _c2012. |
||
| 300 |
_av. : _bill. (some col.) ; _c29 cm. |
||
| 365 |
_aGBP _b235.00 |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 4 | _aNanotechnology | |
| 942 |
_2ddc _cBK |
||
| 999 |
_c254135 _d254135 |
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