000 00759nam a2200277 a 4500
001 2833666
003 BD-DhUL
005 20150113185857.0
008 830901s1976 ne a b 001 0 eng
010 _a 83195117
020 _a0720402138
020 _a0444108017
040 _aDLC
_cDLC
_dDLC
_dBD-DhUL
050 0 0 _aTJ940
_b.R63 1982
082 0 0 _a621.55
_bR845V
100 1 _aRoth, A.
245 1 0 _aVacuum technology /
_cA. Roth.
250 _a2nd, rev. ed.
260 _aNew York :
_bElsevier North-Holland,
_cc1976.
300 _axiv, 496 p. :
_bill. ;
_c23 cm.
500 _aIncludes index.
504 _aBibliography: p. 464-517.
650 0 _aVacuum technology.
906 _a7
_bcbc
_corignew
_d3
_encip
_f19
_gy-gencatlg
942 _2ddc
_cBK
999 _c30529
_d30529