000 00695pam a2200241 i 4500
001 2265287
003 BD-DhUL
005 20150115100235.0
008 781219s1979 vaua 001 0 eng
010 _a 78031381
020 _a0835930920
040 _aDLC
_cDLC
_dDLC
_dBD-DhUL
050 0 0 _aTK7874
_b.V47
082 0 0 _a621.38173
_bV549i
100 1 _aVeronis, Andrew.
245 1 0 _aIntegrated circuit fabrication technology /
_cAndrew Veronis.
260 _aReston, Va. :
_bReston Pub. Co. ,
_cc1979.
300 _ax, 193 p. :
_bill. ;
_c24 cm.
500 _aIncludes index.
650 0 _aIntegrated circuits.
906 _a7
_bcbc
_corignew
_d1
_eocip
_f19
_gy-gencatlg
942 _2ddc
_cBK
999 _c31364
_d31364