000 01291cam a2200337 a 4500
001 3470762
003 BD-DhUL
005 20150115115332.0
008 931007s1994 nyua b 001 0 eng
010 _a 93040716
020 _a0471580058 (alk. paper)
040 _aDLC
_cDLC
_dDLC
_dBD-DhUL
050 0 0 _aTK7874
_b.G473 1994
082 0 0 _a621.38152
_223
_bGHV
100 1 _aGhandhi, Sorab Khushro,
_d1928-
245 1 0 _aVLSI fabrication principles :
_bsilicon and gallium arsenide /
_cSorab K. Ghandhi.
250 _a2nd ed.
260 _aNew York :
_bWiley,
_cc1994.
300 _axxiv, 834 p. :
_bill. ;
_c25 cm.
365 _aUSD
_b7.50
500 _a"A Wiley-Interscience publication."
504 _aIncludes bibliographical references and index.
650 0 _aIntegrated circuits
_xVery large scale integration.
650 0 _aSilicon.
650 0 _aGallium arsenide.
740 0 _aVery large scale integration fabrication principles.
856 4 2 _3Publisher description
_uhttp://www.loc.gov/catdir/description/wiley037/93040716.html
856 4 _3Table of Contents
_uhttp://www.loc.gov/catdir/toc/onix05/93040716.html
942 _2ddc
_cBK
955 _apc16 to ja00 10-07-93; jg02/jg04 10-08-93; jf08 10-08-93 to SL; jf14 10-08-93;aa03 10-12-93; CIP ver. pv07 04-11-94
999 _c31506
_d31506