| 000 | 00891pam a2200277 a 4500 | ||
|---|---|---|---|
| 001 | 3332816 | ||
| 003 | BD-DhUL | ||
| 005 | 20150115120433.0 | ||
| 008 | 850806s1986 nyua b 001 0 eng | ||
| 010 | _a 85018196 | ||
| 020 |
_a0070193045 : _c$42.00 |
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| 040 |
_aDLC _cDLC _dDLC _dBD-DhUL |
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| 050 | 0 | 0 |
_aTK7874 _b.E495 1986 |
| 082 | 0 | 0 |
_a621.38173 _219 _bELM |
| 100 | 1 | _aElliott, David J. | |
| 245 | 1 | 0 |
_aMicrolithography : _bprocess technology for IC fabrication / _cDavid J. Elliott. |
| 260 |
_aNew York : _bMcGraw-Hill, _cc1986. |
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| 300 |
_axix, 378 p. : _bill. ; _c24 cm. |
||
| 365 |
_aGBP _b39.95 |
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| 504 | _aIncludes bibliographies and index. | ||
| 650 | 0 |
_aIntegrated circuits _xVery large scale integration _xDesign and construction. |
|
| 650 | 0 | _aMicrolithography. | |
| 650 | 0 | _aPhotoresists. | |
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg |
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| 942 |
_2ddc _cBK |
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| 999 |
_c31515 _d31515 |
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