| 000 | 01039cam a22002894a 4500 | ||
|---|---|---|---|
| 001 | 12011965 | ||
| 003 | BD-DhUL | ||
| 005 | 20150115145034.0 | ||
| 008 | 000518s2001 njua b 001 0 eng | ||
| 010 | _a 00041653 | ||
| 020 | _a0130815209 | ||
| 040 |
_aDLC _cDLC _dDLC _dBD-DhUL |
||
| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTK7836 _b.Q27 2001 |
| 082 | 0 | 0 |
_a621.38152 _bQUS |
| 100 | 1 |
_aQuirk, Michael. _d1953- |
|
| 245 | 1 | 0 |
_aSemiconductor manufacturing technology / _cMichael Quirk and Julian Serda. |
| 260 |
_aUpper Saddle River, NJ : _bPrentice Hall, _cc2001. |
||
| 300 |
_axiii, 666 p. : _bill. ; _c29 cm. |
||
| 504 | _aIncludes bibliographical references (p. 647) and index. | ||
| 650 | 0 | _aElectronic industries. | |
| 650 | 0 |
_aSemiconductors _xDesign and construction. |
|
| 700 | 1 | _aSerda, Julian. | |
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f20 _gy-gencatlg |
||
| 942 |
_2ddc _cBK |
||
| 955 |
_ato ASCD pc16 05-18-00; jf09 (desc) 5-18-2000; jf08 05-19-00 to SL; jf12 to Dewey 05-24-00; aa07 05-30-00 _ajf01 2001-08-22 copy 2 added to BCCD |
||
| 999 |
_c31678 _d31678 |
||