000 01337cam a2200361 a 4500
001 12936268
003 BD-DhUL
005 20150115150519.0
008 020919s2002 enka b 001 0 eng d
010 _a 2002512459
015 _aGBA1-Z8391
020 _a3527302573
035 _a(OCoLC)ocm45647850
040 _aUKM
_cUKM
_dOHX
_dTXH
_dDLC
_dBD-DhUL
042 _alccopycat
050 0 0 _aQC611
_b.K75 2002
072 7 _aTA
_2lcco
082 0 4 _a621.38152
_221
_bKOS
100 1 _aKorvink, J. G.
_q(Jan G.)
245 1 0 _aSemiconductors for micro- and nanotechnology :
_ban introduction for engineers /
_cJan G. Korvink and Andreas Greiner.
260 _aWeinheim :
_bWiley-VCH,
_cc2002.
300 _a340 p. :
_bill. ;
_c24 cm.
504 _aIncludes bibliographical references and index.
650 0 _aSemiconductors
_vTextbooks.
650 0 _aNanotechnology
_xMathematics
_vTextbooks.
650 0 _aMicrotechnology
_xMathematics
_vTextbooks.
700 1 _aGreiner, Andreas.
856 4 2 _3Publisher description
_uhttp://www.loc.gov/catdir/description/wiley0310/2002512459.html
856 4 1 _3Table of contents
_uhttp://www.loc.gov/catdir/toc/wiley031/2002512459.html
906 _a7
_bcbc
_ccopycat
_d2
_encip
_f20
_gy-gencatlg
942 _2ddc
_cBK
955 _aps10 2002-09-19 to ASCD
_ajf00 2002-09-23;
_cjf03 2002-09-24 to Subj.
999 _c31703
_d31703