000 | 00867cam a2200277 4500 | ||
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001 | 4078272 | ||
003 | BD-DhUL | ||
005 | 20150115152809.0 | ||
008 | 721013s1973 nyua b 000 0 eng | ||
010 | _a 72010383 | ||
020 | _a0471950009 | ||
040 |
_aDLC _cDLC _dDLC _dBD-DhUL |
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050 | 0 | 0 |
_aTK7871.85 _b.W54 |
082 | 0 | 0 |
_a621.3815 _bWII |
100 | 1 | _aWilson, Robert G. | |
245 | 1 | 0 |
_aIon beams; with applications to ion implantation / _cRobert G. Wilson [and] George R. Brewer. |
260 |
_aNew York, _bWiley _c[1973] |
||
300 |
_axii, 500 p. : _billus. _c23 cm. |
||
500 | _a"A Wiley-Interscience publication." | ||
504 | _aIncludes bibliographies. | ||
650 | 0 | _aIon implantation. | |
650 | 0 | _aIon bombardment. | |
700 | 1 |
_aBrewer, George Raymond, _d1922- _ejoint author. |
|
906 |
_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg |
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942 |
_2ddc _cBK |
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999 |
_c31747 _d31747 |