000 01542cam a2200397 a 4500
001 14888868
003 BD-DhUL
005 20150117124310.0
008 070612s2008 njua b 001 0 eng
010 _a 2007024692
015 _aGBA788215
_2bnb
016 7 _a014235237
_2Uk
020 _a9780470174470 (cloth)
020 _a0470174471 (cloth)
035 _a(OCoLC)ocn144770106
035 _a(OCoLC)144770106
040 _aDLC
_cDLC
_dBAKER
_dBTCTA
_dUKM
_dYDXCP
_dC#P
_dDLC
_dBD-DhUL
050 0 0 _aQD506
_b.I74 2008
082 0 0 _a621.381
_222
_bIRS
100 1 _aIrene, Eugene A.
245 1 0 _aSurfaces, interfaces, and thin films for microelectronics /
_cEugene A. Irene.
260 _aHoboken, N.J. :
_bWiley-Interscience,
_cc2008.
300 _axiii, 515 p. :
_bill. ;
_c25 cm.
365 _aUS$
_b134.95
504 _aIncludes bibliographical references and index.
650 0 _aSurface chemistry.
650 0 _aInterfaces (Physical sciences)
650 0 _aThin films.
650 0 _aMicroelectronics
_xMaterials.
856 4 1 _3Table of contents only
_uhttp://www.loc.gov/catdir/toc/ecip0720/2007024692.html
856 4 2 _3Publisher description
_uhttp://www.loc.gov/catdir/enhancements/fy0741/2007024692-d.html
856 4 2 _3Contributor biographical information
_uhttp://www.loc.gov/catdir/enhancements/fy0806/2007024692-b.html
906 _a7
_bcbc
_corignew
_d1
_eecip
_f20
_gy-gencatlg
942 _2ddc
_cBK
955 _ajp43 2007-06-12
_cjp43 2007-06-12 to subj
_aaa07 2007-06-15
_aps10 2008-03-12 1 copy rec'd., to CIP ver.
999 _c32004
_d32004