000 | 01542cam a2200397 a 4500 | ||
---|---|---|---|
001 | 14888868 | ||
003 | BD-DhUL | ||
005 | 20150117124310.0 | ||
008 | 070612s2008 njua b 001 0 eng | ||
010 | _a 2007024692 | ||
015 |
_aGBA788215 _2bnb |
||
016 | 7 |
_a014235237 _2Uk |
|
020 | _a9780470174470 (cloth) | ||
020 | _a0470174471 (cloth) | ||
035 | _a(OCoLC)ocn144770106 | ||
035 | _a(OCoLC)144770106 | ||
040 |
_aDLC _cDLC _dBAKER _dBTCTA _dUKM _dYDXCP _dC#P _dDLC _dBD-DhUL |
||
050 | 0 | 0 |
_aQD506 _b.I74 2008 |
082 | 0 | 0 |
_a621.381 _222 _bIRS |
100 | 1 | _aIrene, Eugene A. | |
245 | 1 | 0 |
_aSurfaces, interfaces, and thin films for microelectronics / _cEugene A. Irene. |
260 |
_aHoboken, N.J. : _bWiley-Interscience, _cc2008. |
||
300 |
_axiii, 515 p. : _bill. ; _c25 cm. |
||
365 |
_aUS$ _b134.95 |
||
504 | _aIncludes bibliographical references and index. | ||
650 | 0 | _aSurface chemistry. | |
650 | 0 | _aInterfaces (Physical sciences) | |
650 | 0 | _aThin films. | |
650 | 0 |
_aMicroelectronics _xMaterials. |
|
856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/toc/ecip0720/2007024692.html |
856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0741/2007024692-d.html |
856 | 4 | 2 |
_3Contributor biographical information _uhttp://www.loc.gov/catdir/enhancements/fy0806/2007024692-b.html |
906 |
_a7 _bcbc _corignew _d1 _eecip _f20 _gy-gencatlg |
||
942 |
_2ddc _cBK |
||
955 |
_ajp43 2007-06-12 _cjp43 2007-06-12 to subj _aaa07 2007-06-15 _aps10 2008-03-12 1 copy rec'd., to CIP ver. |
||
999 |
_c32004 _d32004 |