000 00665nam a22002177a 4500
003 BD-DhUL
005 20150117130805.0
008 150117s1996 US a|||| |||| 001 0 eng d
040 _aBD-DhUL
_cBD-DhUL
082 _a621.381
_bULT
245 _aULSI technology /
_ced. by C. Y. chang nad S. M. Sze.
260 _aNew York :
_bMcGraw-hill,
_cc 1996.
300 _axxv, 726 p. :
_bill. ;
_c22 cm.
365 _aUS$.
_b17.75
490 _aMcGraw-hill series in electrical and computer engineering.
504 _aincludes bibliographical references and index.
650 _aSemiconductors.
700 _4Chang, C. Y.
700 _aS. M. Sze.
942 _2ddc
_cBK
999 _c32035
_d32035