000 01445cam a2200385 a 4500
001 378642
003 BD-DhUL
005 20150117150410.0
008 850815s1983 nyua b 101 0 eng
010 _a 83008028
020 _a0444007822 :
_c$73.00
035 _a(OCoLC)9440983
035 _a(OCoLC)ocm09440983
035 _a(CStRLIN)NYCG85-B80888
035 _a(NNC)378642
040 _aBD-DhUL
_cBD-DhUL
050 0 _aTA1673
_b.L355 1983
082 0 _a621.3815
_bOSL
090 _aTA1673
_b.L355 1983
245 0 0 _aLaser diagnostics and photochemical processing for semiconductor devices :
_bsymposium held November 1982 in Boston, Massachusetts, U.S.A. /
_ceditors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.
260 _aNew York :
_bNorth-Holland,
_cc1983.
300 _axiii, 298 p. :
_bill. ;
_c24 cm.
490 1 _aMaterials Research Society symposia proceedings ;
_vv. 17
500 _a"Sponsored by the Air Force Office of Scientific Research"--T.p. verso.
504 _aIncludes bibliographical references and indexes.
650 0 _aLasers
_xIndustrial applications
_vCongresses.
650 0 _aSemiconductors
_vCongresses.
700 1 _aOsgood, R. M.
700 1 _aBrueck, S. R. J.
700 1 _aSchlossberg, H. R.
710 1 _aUnited States.
_bAir Force.
_bOffice of Scientific Research.
830 0 _aMaterials Research Society symposia proceedings ;
_vv. 17.
900 _aAUTH
942 _2ddc
_cBK
999 _c32115
_d32115