000			01797cam a22004574a 4500
001			16315730
003			BD-DhUL
005			20150118110709.0
008			100706s2010 gw a b 001 0 eng c
010			_a 2010931868
015			_a10,N21 _2dnb
016	7		_a1002586631 _2DE-101
016	7		_a015672662 _2Uk
020			_a364210522X
020			_a9783642105227
035			_a(OCoLC)ocn664234224
040			_aYDXCP _beng _cYDXCP _dTJC _dOHX _dGWDNB _dIXA _dOCLCQ _dVRC _dUKMGB _dOCLCQ _dDLC _dBD-DhUL
042			_apcc
050	0	0	_aTA1677 _b.L3675 2010
082			_a621.366 _bLAS
245	0	0	_aLaser precision microfabrication / _cKoji Sugioka, Michel Meunier, Alberto Piqué, editors.
260			_aBerlin : _bSpringer, _cc2010.
300			_axvi, 344 p. : _bill. (some col.) ; _c24 cm.
490	1		_aSpringer series in materials science ; _v135
504			_aIncludes bibliographical references and index.
650		0	_aLasers _xIndustrial applications.
650		0	_aMicrofabrication.
650		0	_aManufacturing processes.
650	0	7	_aMikrofertigung. _2swd
650	0	7	_aLaserbearbeitung. _2swd
700	1		_aSugioka, Kōji.
700	1		_aMeunier, Michel, _d1956-
700	1		_aPiqué, Alberto.
830		0	_aSpringer series in materials science ; _vv. 135.
856	4	2	_3Contributor biographical information _uhttp://www.loc.gov/catdir/enhancements/fy1316/2010931868-b.html
856	4	2	_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy1316/2010931868-d.html
856	4	1	_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy1316/2010931868-t.html
906			_a7 _bcbc _cpccadap _d2 _eepcn _f20 _gy-gencatlg
942			_2ddc _cBK
955			_apc17 2010-07-06 _ath57 2011-06-21 to USPL/STM _bxh15 2012-07-30 z-processor to US/ANGLO to Dewey c.1
999			_c32593 _d32593