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| 003 | BD-DhUL | ||
| 005 | 20210624110213.0 | ||
| 008 | 110519s2012 flua b 001 0 eng | ||
| 010 |
_a 2011014406 _z 2011014404 _z 2011014405 |
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| 020 | _a9781420055191 (hbk) | ||
| 035 | _a(OCoLC)ocn727047810 | ||
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_aDLC _cDLC _dYDX _dYDXCP _dCDX _dCOO _dMYPMP _dDLC _dBD-DhUL |
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| 100 | 1 | _aMadou, Marc J. | |
| 245 | 1 | 0 |
_aFundamentals of microfabrication and nanotechnology : _bVol. 2 : Manufacturing techniques for microfabrication and nanotechnology / _cMarc J. Madou. |
| 250 | _a3rd ed. | ||
| 260 |
_aBoca Raton : _bCRC Press, _c2012. |
||
| 300 |
_av. : _bill. (some col.) ; _c29 cm. |
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| 365 |
_aUSD _b95.04 |
||
| 365 |
_aGBP _b235.00 |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 4 | _aNanotechnology | |
| 942 |
_2ddc _cBK |
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| 999 |
_c33025 _d33025 |
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