Laser precision microfabrication /
Koji Sugioka, Michel Meunier, Alberto Piqué, editors.
- Berlin : Springer, c2010.
- xvi, 344 p. : ill. (some col.) ; 24 cm.
- Springer series in materials science ; 135 .
- Springer series in materials science ; v. 135. .
Includes bibliographical references and index.
364210522X 9783642105227
2010931868
10,N21 dnb
1002586631 DE-101 015672662 Uk
Lasers--Industrial applications.
Microfabrication.
Manufacturing processes.
Mikrofertigung.
Laserbearbeitung.
TA1677 / .L3675 2010
621.366 / LAS
Includes bibliographical references and index.
364210522X 9783642105227
2010931868
10,N21 dnb
1002586631 DE-101 015672662 Uk
Lasers--Industrial applications.
Microfabrication.
Manufacturing processes.
Mikrofertigung.
Laserbearbeitung.
TA1677 / .L3675 2010
621.366 / LAS