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Laser precision microfabrication /

by Sugioka, Kōji; Meunier, Michel; Piqué, Alberto.
Material type: materialTypeLabelBookSeries: Springer series in materials science: v. 135.Publisher: Berlin : Springer, c2010Description: xvi, 344 p. : ill. (some col.) ; 24 cm.ISBN: 364210522X; 9783642105227.Subject(s): Lasers -- Industrial applications | Microfabrication | Manufacturing processes | Mikrofertigung | LaserbearbeitungOnline resources: Contributor biographical information | Publisher description | Table of contents only
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Non Fiction 621.366 LAS (Browse shelf) Available 461040

Includes bibliographical references and index.

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Last Updated on September 15, 2019
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