Boyd, Ian W., 1958-
Laser processing of thin films and microstructures : oxidation, deposition, and etching of insulators / Ian W. Boyd. - Berlin ; New York : Springer-Verlag, c1987. - viii, 320 p. : ill. ; 24 cm. - Springer series in materials science ; 3 . - Springer series in materials science ; vol. 3. .
Includes bibliographical references and index.
0387179518 (U.S.)
87020660
Lasers--Industrial applications.
TA1677 / .B69 1987
621.366 / BOL
Laser processing of thin films and microstructures : oxidation, deposition, and etching of insulators / Ian W. Boyd. - Berlin ; New York : Springer-Verlag, c1987. - viii, 320 p. : ill. ; 24 cm. - Springer series in materials science ; 3 . - Springer series in materials science ; vol. 3. .
Includes bibliographical references and index.
0387179518 (U.S.)
87020660
Lasers--Industrial applications.
TA1677 / .B69 1987
621.366 / BOL