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Laser processing of thin films and microstructures : oxidation, deposition, and etching of insulators /

by Boyd, Ian W.
Material type: materialTypeLabelBookSeries: Springer series in materials science: vol. 3.Publisher: Berlin ; New York : Springer-Verlag, c1987Description: viii, 320 p. : ill. ; 24 cm.ISBN: 0387179518 (U.S.).Subject(s): Lasers -- Industrial applications
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Non Fiction 621.366 BOL (Browse shelf) Available 337130

Includes bibliographical references and index.

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Last Updated on September 15, 2019
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