Madou, Marc J.
Fundamentals of microfabrication and nanotechnology : Vol. 1 : Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / Marc J. Madou. - 3rd ed. - Boca Raton : CRC Press, 2012. - v. : ill. (some col.) ; 29 cm.
Includes bibliographical references and index.
9781420055115 (hbk)
2011014406
Nanotechnology.
TK7875 / .M33 2012
620.5 / MAF
Fundamentals of microfabrication and nanotechnology : Vol. 1 : Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / Marc J. Madou. - 3rd ed. - Boca Raton : CRC Press, 2012. - v. : ill. (some col.) ; 29 cm.
Includes bibliographical references and index.
9781420055115 (hbk)
2011014406
Nanotechnology.
TK7875 / .M33 2012
620.5 / MAF