Fundamentals of microfabrication and nanotechnology : Vol. 1 : Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /
by Madou, Marc J.
Material type:
BookPublisher: Boca Raton : CRC Press, 2012Edition: 3rd ed.Description: v. : ill. (some col.) ; 29 cm.ISBN: 9781420055115 (hbk).Subject(s): Nanotechnology
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Includes bibliographical references and index.
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