Microlithography : process technology for IC fabrication /
by Elliott, David J.
Material type:
BookPublisher: New York : McGraw-Hill, c1986Description: xix, 378 p. : ill. ; 24 cm.ISBN: 0070193045 :.Subject(s): Integrated circuits -- Very large scale integration -- Design and construction | Microlithography | Photoresists
| Item type | Current location | Collection | Call number | Status | Date due | Barcode |
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Dhaka University Science Library General Stacks | Non Fiction | 621.38173 ELM (Browse shelf) | Available | 314846 |
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| 621.38173 ELI Integrated circuit fabrication technology / | 621.38173 ELI Integrated circuit fabrication technology / | 621.38173 ELI Integrated circuit fabrication technology / | 621.38173 ELM Microlithography : | 621.38173 F637d The design of logical machines / | 621.38173 GRA Analog MOS integrated circuits for signal processing / | 621.38173 GRA Analog MOS integrated circuits for signal processing / |
Includes bibliographies and index.
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