Handbook of thin film process technology /
by Glocker, David A; Shah, S. Ismat; Westwood, William D. (William Dickson).
Material type:
BookPublisher: Bristol, UK ; Philadelphia : Institute of Physics, c1995Description: xvii, 1 v. (various pagings) : ill. ; 31 cm.ISBN: 0750303115; 0750305290 (98/2 suppl.).Other title: Thin film process technology.Uniform titles: 98/1 Reactive sputtering; 98/2 Recipes for optical materials.Subject(s): Thin films -- Handbooks, manuals, etc | Surfaces (Technology) -- Handbooks, manuals, etcOnline resources: Publisher description
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Dhaka University Science Library General Stacks | Non Fiction | 621.38152 HAN (Browse shelf) | Available | 359474 |
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| 621.38152 GHV VLSI fabrication principles : | 621.38152 GIO Oriented crystallization on amorphous substrates / | 621.38152 GRO Growth and characterisation of semiconductors : | 621.38152 HAN Handbook of thin film process technology / | 621.38152 KIS SPICE : | 621.38152 KOS Semiconductors for micro- and nanotechnology : | 621.38152 KOS Semiconductors for micro- and nanotechnology : |
Accompanied by: Supplement 98/1, Reactive sputtering / guest editor, William D. Westwood (1 v. (various pagings) : ill. ; 30 cm.) Bristol ; Philadelphia : The Institute, [c1998]. Call number: TA418.9.T45 H36 1995 Suppl. 98/1
Accompanied by : Supplement 98/2, Recipes for optical materials / editors, David A. Glocker, S. Ismat Shah (1 v. (various pagings) : ill. ; 31 cm.) Bristol ; Philadelphia : The Institute, [c1998]. Call number: TA418.9.T45 H36 1995 Suppl. 98/2
Includes bibliographical references and indexes.
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