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41. Resonant MEMS : fundamentals, implementation and application / [electronic resource]

by Brand, Oliver; Dufour, Isabelle (Electrical engineer); Heinrich, Stephen M; Josse, Fabien.

Material type: book Book; Format: available online remote; Literary form: not fiction Publisher: Wiesbaden : Wiley-VCH Verlag & Co. KGaA, [2015]Online Access: Wiley Online Library Availability: No items available

Last Updated on September 15, 2019
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