Semiconductor lithography : principles, practices, and materials /
by Moreau, Wayne M.
Material type:
BookSeries: Microdevices.Publisher: New York : Plenum Press, c1988Description: xx, 931 p. : ill. ; 25 cm.ISBN: 0306421852.Subject(s): Semiconductors | Microlithography | Photoresists
| Item type | Current location | Collection | Call number | Status | Date due | Barcode |
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Books
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Dhaka University Science Library General Stacks | Non Fiction | 621.38152 MOS (Browse shelf) | Available | 355583 |
Includes bibliographies and index.
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