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Chemistry and lithography /

by Okoroanyanwu, Uzodinma; Society of Photo-optical Instrumentation Engineers.
Material type: materialTypeLabelBookPublisher: Hoboken, N.J. : Bellingham, Wash., USA : Wiley ; SPIE Press, c2010Description: xxix, 861 p. : ill. ; 26 cm.ISBN: 9780819475626 (SPIE); 9781118030028 (Wiley).Subject(s): Lithography | Chemistry, Technical | Semiconductors -- Etching
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Books Books Dhaka University Science Library
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Non Fiction 621.381531 OKC (Browse shelf) Available 475397

Includes bibliographical references and index.

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Last Updated on September 15, 2019
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