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Acoustic wave and electromechanical resonators : concept to key applications /

by Campanella, Humberto.
Material type: materialTypeLabelBookSeries: Publisher: Norwood, MA. : Artech House, c2010Description: xv, 345 p. : ill. ; 26 cm.ISBN: 9781607839774; 1607839776.Other title: Acoustic wave & electromechanical resonators.Subject(s): Acoustic surface wave devices | Electric resonators
Contents:
1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies.
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