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Atomic layer deposition : principles, characteristics, and nanotechnology applications / [electronic resource]

by Kääriäinen, Tommi; Cameron, David; Kääriäinen, Marja-Leena; Sherman, Arthur.
Material type: materialTypeLabelBookPublisher: Salem, Massachusetts : Scrivener Publishing, LLC ; [2013]Edition: 2nd edition.Description: 1 online resource.ISBN: 9781118747384; 1118747380; 9781118747421; 1118747429; 9781118747346; 1118747348; 9781118747407; 1118747402; 9781299619128; 1299619126.Subject(s): Chemical vapor deposition | Epitaxy | Microelectronics | Nanotechnology | SCIENCE -- Nanoscience | TECHNOLOGY & ENGINEERING -- Nanotechnology & MEMS | Chemical vapor deposition | Epitaxy | Microelectronics | Nanotechnology | Nanotechnologie | Atomlagenabscheidung | Mikroelektromekaniska system | Electronic books | Electronic booksOnline resources: Wiley Online Library
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Includes bibliographical references and index.

Print version record and CIP data provided by publisher.

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Last Updated on September 15, 2019
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